Flexible microassembly methods for micro/nanofluidic chips with an inverted microscope
One method of fabricating micro/nanofluidic chips is to form microchannels and nanochannels in different plates and then assemble them together. In this paper, two practicable methods for the assembly of the micro/nanofluidic chips were built up. One was the rotating-then-pushing method (RP) and the...
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Veröffentlicht in: | Microelectronic engineering 2012-09, Vol.97, p.1-7 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | One method of fabricating micro/nanofluidic chips is to form microchannels and nanochannels in different plates and then assemble them together. In this paper, two practicable methods for the assembly of the micro/nanofluidic chips were built up. One was the rotating-then-pushing method (RP) and the other was the picking-up-then-placing-down method (PP). Only an inverted microscope and a few mechanical parts were needed. With the well-assembled chips, the experiments of enrichment and micro/nano-flow were conducted. Relevant devices, processes, and characteristics were presented in detail. These flexible assembly methods present the advantages such as low-cost, flexibility, and interchangeability. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2012.02.040 |