The nature of processes controlling the kinetics of indium oxide-based thin film gas sensor response

The nature of processes controlling the kinetics of indium oxide-based thin film gas sensor response

This paper analyzes the processes controlling the rate of conductivity response of In 2O 3-based thin film sensors to both reducing and oxidizing gases. In 2O 3 films with a thickness from 20 to 400 nm were deposited using a spray pyrolysis method. It was established that five different processes wi...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2007-12, Vol.128 (1), p.51-63
Hauptverfasser: Korotcenkov, Ghenadii, Brinzari, Vladimir, Stetter, Joseph R., Blinov, Iuri, Blaja, Valeriu
Format: Artikel
Sprache:eng
Schlagworte:
Activation energy
Adsorption
Adsorption/desorption
Desorption
Diffusion
In 2O 3
Indium oxides
Kinetics
Operating temperature
Sensor response
Sensors
Surface chemistry
Thin films
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Zusammenfassung:This paper analyzes the processes controlling the rate of conductivity response of In 2O 3-based thin film sensors to both reducing and oxidizing gases. In 2O 3 films with a thickness from 20 to 400 nm were deposited using a spray pyrolysis method. It was established that five different processes with activation energies ( E act) of
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2007.05.028