96 mW longitudinal single mode red-emitting distributed Bragg reflector ridge waveguide laser with tenth order surface gratings

Red-emitting ridge waveguide lasers with integrated tenth order surface distributed Bragg reflector gratings were developed. The grating was implemented by the use of a BCl3-Ar-plasma, while the shape of the grating trench was controlled by additional He-backside cooling of the wafer. The devices ex...

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Veröffentlicht in:Optics letters 2012-05, Vol.37 (9), p.1532-1534
Hauptverfasser: Feise, D, John, W, Bugge, F, Blume, G, Hassoun, T, Fricke, J, Paschke, K, Erbert, G
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Sprache:eng
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Zusammenfassung:Red-emitting ridge waveguide lasers with integrated tenth order surface distributed Bragg reflector gratings were developed. The grating was implemented by the use of a BCl3-Ar-plasma, while the shape of the grating trench was controlled by additional He-backside cooling of the wafer. The devices exhibit longitudinal single mode operation up to 96 mW at 635.3 nm with a side mode suppression ratio of 18 dB and a good beam quality of M2
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.37.001532