Investigation of the Effect of Residual and Axial Stress, on Pull-in Instability of a Fully Clamped Micro-beam under Electrostatic Actuation, Considering Fringing Field Effect

In this paper the effect of residual stress due to fabrication process and axial stress due to self stretching, on Pull-in instability of a Clamped-Clamped micro-beam, exposed to electrostatic actuation is investigated. The nonlinear electromechanical integro-differential equation governing the problem is solved using a Finite element code. The problem is solved for various values of residual stresses, and initial gaps. The achieved results are finally compared to that of reported ones. [PUBLICATION ABSTRACT]