Effect of crystallisation on the magnetic properties of FeCuNbBSi amorphous thin films produced by sputtering
Soft magnetic thin films of FeCuNbSiB alloy having different thickness were deposited on a Si3N4 substrate by rf sputtering. The target was made of amorphous ribbons having nominal composition Fe73.5Cu1Nb3Si13.5B9. The amorphicity of as‐deposited films has been checked by X‐ray diffraction technique...
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Veröffentlicht in: | Physica status solidi. C 2011-11, Vol.8 (11-12), p.3070-3073 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Soft magnetic thin films of FeCuNbSiB alloy having different thickness were deposited on a Si3N4 substrate by rf sputtering. The target was made of amorphous ribbons having nominal composition Fe73.5Cu1Nb3Si13.5B9. The amorphicity of as‐deposited films has been checked by X‐ray diffraction technique. Selected samples have been submitted to controlled annealing to induce the amorphous‐to‐crystalline transformation. The influence of thermal treatments on the hysteresis properties has been studied as a function of thickness and microstructure on as prepared and annealed samples. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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ISSN: | 1862-6351 1610-1642 1610-1642 |
DOI: | 10.1002/pssc.201000197 |