Two-Dimensional Terahertz Photonic Crystals Fabricated by Wet Chemical Etching of Silicon

The fabrication of two-dimensional terahertz photonic crystals using wet chemical etching of high-resistivity silicon is described. Wet-etched photonic crystals with a sloped sidewall were fabricated in 16 × 10 square lattices with a period of 1430 μm and a height of 150 μm, and were bonded between...

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