Artificial Cilia: Generation of Magnetic Actuators in Microfluidic Systems

Magnetic artificial cilia are fabricated from photoreactive copolymer precursors filled with magnetic nanoparticles by a new photolithographic process. Two different crosslinkers and UV‐radiation of two different wavelengths are used to generate arrays of planar magnetically actuatable rubber flaps. The cilia are integrated into a microfluidic channel and operated in water using a rotating permanent magnet. Magnetic artificial cilia are fabricated from photoreactive copolymer precursors filled with magnetic nanoparticles by a new photolithographic process. Two different crosslinkers and UV‐radiation of two different wavelengths are used to generate arrays of planar magnetically actuatable rubber flaps. The cilia are integrated into a microfluidic channel and operated in water using a rotating permanent magnet.