Reference material for transmission electron microscope calibration

Reference material for transmission electron microscope calibration

We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabric...

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Veröffentlicht in:Measurement science & technology 2011-09, Vol.22 (9), p.94014-1-5
Hauptverfasser: Filippov, M N, Gavrilenko, V P, Kovalchuk, M V, Mityukhlyaev, V B, Ozerin, Yu V, Rakov, A V, Roddatis, V V, Todua, P A, Vasiliev, A L
Format: Artikel
Sprache:eng
Schlagworte:
Calibration
Cross sections
Lattices
Microscopes
Reference materials
Scanning electron microscopy
Transmission electron microscopy
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Beschreibung
Zusammenfassung:We propose a new type of reference material as a magnification standard of a transmission electron microscope (TEM) and a scanning transmission electron microscope. The reference material represents a thin cross-section of a silicon relief structure with certified sizes of its elements. It is fabricated using ion milling. Such reference material can be used for high microscope magnifications (by direct observation of the lattice), as well as for moderate magnifications (around 30000 times).
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/22/9/094014