Haptic controlled three degree-of-freedom microgripper system for assembly of detachable surface-micromachined MEMS

In this work, we describe the implementation of a three degree-of-freedom meso to microscale manipulation system for handling MEMS and micro-objects. A number of commercially available hardware components have been integrated to produce this system. Microgrippers, with an operational range of 0–100μm, were used as the end-effector for the manipulation system. Three-axis control of the microgripper's position was obtained using micromanipulators coupled to stepper motors. For each of the three linear axes, a total travel of ∼24mm, with ∼0.5μm/step size, was achieved. A haptic was used as the primary human interface to the system to control the actuation of the microgripper and control its position. To demonstrate the functionality of the system, the microgripper was used to manipulate micro-objects and to pick and place a surface-micromachined microgripper. The micro-objects included ∼100μm diameter polysilicon chess pieces that were moved around a microscale polysilicon chessboard (∼ 1mm×1mm). A microgripper was taken off the substrate it was fabricated on and assembled on a printed-circuit board. The assembled surface-micromachined microgripper was demonstrated in handling another microgripper. The entire system is interfaced by LabVIEW software.