Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects

Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects

We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.

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Veröffentlicht in:Optics express 2012-05, Vol.20 (11), p.12035-12039
Hauptverfasser: Li, Guoliang, Yao, Jin, Thacker, Hiren, Mekis, Attila, Zheng, Xuezhe, Shubin, Ivan, Luo, Ying, Lee, Jin-Hyoung, Raj, Kannan, Cunningham, John E, Krishnamoorthy, Ashok V
Format: Artikel
Sprache:eng
Schlagworte:
Equipment Design
Equipment Failure Analysis
Semiconductors
Surface Plasmon Resonance - instrumentation
Telecommunications - instrumentation
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Zusammenfassung:We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.20.012035