Characteristics of Extended Nonthermal Plasma Source Based on a One-Dimensional DBD in a Narrow Gap of 100-200 mu hbox m

Characteristics of Extended Nonthermal Plasma Source Based on a One-Dimensional DBD in a Narrow Gap of 100-200 mu hbox m

An extended 1-D dielectric-barrier discharge (DBD) in a very narrow gap generates nonthermal microplasma at higher pressure and is attractive for surface technologies in that the predefined volumes with submillimeter linear dimensions can be locally activated and treated. Such a discharge has been d...

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Veröffentlicht in:IEEE transactions on plasma science 2011-11, Vol.39 (11), p.2110-2111
Hauptverfasser: Akishev, Yuri, Grushin, Mikhail, Karalnik, Vladimir, Petryakov, Alex, Supiot, Philippe, Trushkin, Nikolay
Format: Artikel
Sprache:eng
Schlagworte:
Discharge
Electric potential
Electrodes
Microplasmas
Reactors
Surface chemistry
Voltage
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Zusammenfassung:An extended 1-D dielectric-barrier discharge (DBD) in a very narrow gap generates nonthermal microplasma at higher pressure and is attractive for surface technologies in that the predefined volumes with submillimeter linear dimensions can be locally activated and treated. Such a discharge has been designed with the use of a thin blade placed very closely over a plane-barrier electrode. The search on the characteristics of the linear DBD in He powered by midfrequency alternating-current voltages is performed. The images of microplasma properties typical for this reactor are presented.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2148731