Strong biaxial texture and polymorph nature in TiO2 thin film formed by ex-situ annealing on c-plane Al2O3 surface

Many applications based on TiO2 thin films are strongly influenced by the film crystalline quality, microstructure and surface morphology. We have utilized x-ray scattering methods for crystal structure study of TiO2 films, grown by DC reactive magnetron sputtering without heating. We have observed...

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Veröffentlicht in:	Journal of crystal growth 2012, Vol.338 (1), p.118-124
Hauptverfasser:	ROCH, T, DOBROCKA, E, KUS, P, MIKULA, M, PIDIK, A, DURINA, P, HAIDRY, A. A, PLECENIK, T, TRUCHLY, M, GRANCIC, B, PLECENIK, A
Format:	Artikel
Sprache:	eng
Schlagworte:	Anatase Annealing Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Crystal structure Crystalline state (including molecular motions in solids) Crystallographic aspects of phase transformations pressure effects Deposition by sputtering Exact sciences and technology Heating Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure of solids and liquids crystallography Structure of specific crystalline solids Surface layer Texture Thin films Titanium dioxide X-ray diffraction and scattering X-ray scattering (including small-angle scattering)
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Zusammenfassung:	Many applications based on TiO2 thin films are strongly influenced by the film crystalline quality, microstructure and surface morphology. We have utilized x-ray scattering methods for crystal structure study of TiO2 films, grown by DC reactive magnetron sputtering without heating. We have observed the formation of ordered phases after post-deposition ex-situ annealing in air at 600 degree C. The distinct biaxial texture with respect to the c-plane (0001) Al2O3 substrate surface, which developed during heating, shows remarkable patterns in pole figures. We have identified epitaxial relationships of anatase A(001)[110][Verbar]sub(001)[11I"00] and rutile R(100)[001][Verbar]sub(0001)[100] within single TiO2 layer. In addition, within the same sample, we have observed the anatase in (112) orientation with two in-plane relationship options A(112)[11I"0][Verbar]sub(0001)[21I"1I"0] and A(112)[11I"0]a-sub(0001)[11I"00].
ISSN:	0022-0248 1873-5002
DOI:	10.1016/j.jcrysgro.2011.10.053