Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C

Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500°C

Two monolithic CMOS microsystems for gas detection and material characterization fabricated in industrial 0.8-μm CMOS technology combined with post-CMOS micromachining are presented.

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Bibliographische Detailangaben
Veröffentlicht in:IEEE journal of solid-state circuits 2004-07, Vol.39 (7), p.1202
Hauptverfasser: Barrettino, D, Graf, M, Song, Wan Ho, Kirstein, K.-U, Hierlemann, A, Baltes, H
Format: Artikel
Sprache:eng
Schlagworte:
Sensors
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Zusammenfassung:Two monolithic CMOS microsystems for gas detection and material characterization fabricated in industrial 0.8-μm CMOS technology combined with post-CMOS micromachining are presented.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2004.829929