Tunable bulk acoustic wave resonators based on Ba0.25Sr0.75TiO3 thin films and a HfO2/SiO2 bragg reflector

A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba 0.25 Sr 0.75 TiO 3 thin film and an all-dielectric HfO 2 /SiO 2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported f...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2011-12, Vol.58 (12), p.2768-2771
Hauptverfasser:	Berge, John, Gevorgian, Spartak
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic waves Acoustical measurements and instrumentation Acoustics Acoustics - instrumentation Ceramics - chemistry Electrodes Equipment Design Equipment Failure Analysis Exact sciences and technology Frequency measurement Fundamental areas of phenomenology (including applications) Hafnium compounds Impedance Lenses Membranes, Artificial Micro-Electrical-Mechanical Systems - instrumentation Physics Refractometry - instrumentation Resonant frequency Sound Transducers
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Beschreibung
Zusammenfassung:	A switchable and tunable bulk acoustic wave resonator based on a paraelectric phase Ba 0.25 Sr 0.75 TiO 3 thin film and an all-dielectric HfO 2 /SiO 2 Bragg reflector is presented. The achieved tuning range (3.8%) and effective electromechanical coupling coefficient (7.1%) are the highest reported for solidly mounted tunable bulk acoustic wave resonators. The non-conductive Bragg reflector stack provides excellent integration possibilities.
ISSN:	0885-3010 1525-8955 1525-8955
DOI:	10.1109/TUFFC.2011.2142