A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a...

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Veröffentlicht in:	IEEE electron device letters 2008-07, Vol.29 (7), p.701-703
Hauptverfasser:	Lee, J.E.-Y., Bahreyni, B., Yong Zhu, Seshia, A.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic sensors Acoustic wave devices, piezoelectric and piezoresistive devices Allan deviation Applied sciences bulk acoustic resonators Circuit properties Deviation Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Feedback loop Foundries high quality factor MEMS oscillator Micro- and nanoelectromechanical devices (mems/nems) Microcavities Micromechanical devices Oscillators Oscillators, resonators, synthetizers Q factor Quality factor Resonant frequencies Resonant frequency Resonators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Single crystals single-crystal silicon (SCS) Time measurements Timing
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Zusammenfassung:	A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.
ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2008.2000643