High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

Using low-cost and high work-function Ni, a low leakage current of 5times10 -6 A/cm 2 at 125 degC is obtained in a high 25-fF/mum 2 -density SrTiO 3 metal-insulator-metal (MIM) capacitor processed at 400 degC. This is approximately two orders of magnitude better than the same device using a TaN elec...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE electron device letters 2007-03, Vol.28 (3), p.235-237
Hauptverfasser:	Chiang, K.C., Cheng, C.H., Pan, H.C., Hsiao, C.N., Chou, C.P., Chin, A., Hwang, H.L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Capacitance Capacitor Capacitors Compound structure devices Devices Dielectric, amorphous and glass solid devices Dielectrics Electrodes Electronics Exact sciences and technology high temperature Laminates Leakage Leakage current metal-insulator-metal (MIM) MIM capacitors Plasma temperature Radio frequency Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices thermal leakage Tuning Very large scale integration Voltage
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Using low-cost and high work-function Ni, a low leakage current of 5times10 -6 A/cm 2 at 125 degC is obtained in a high 25-fF/mum 2 -density SrTiO 3 metal-insulator-metal (MIM) capacitor processed at 400 degC. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall kappa value beyond previous laminate structure
ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2007.891265