Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates
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Veröffentlicht in: | IEEE electron device letters 2007-06, Vol.28 (6), p.486-488 |
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container_title | IEEE electron device letters |
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creator | RAGNARSSON, Lars-Ake CHANG, Vincent S BIESEMANS, Serge HONG YU YU CHO, Hag-Ju CONARD, Thierry KAI MIN YIN DELABIE, Annelies SWERTS, Johan SCHRAM, Tom DE GENDT, Stefan |
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doi_str_mv | 10.1109/LED.2007.896900 |
format | Article |
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language | eng |
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source | IEEE Electronic Library (IEL) |
subjects | Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology Integrated circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transistors |
title | Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates |
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