Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates

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Veröffentlicht in:IEEE electron device letters 2007-06, Vol.28 (6), p.486-488
Hauptverfasser: RAGNARSSON, Lars-Ake, CHANG, Vincent S, BIESEMANS, Serge, HONG YU YU, CHO, Hag-Ju, CONARD, Thierry, KAI MIN YIN, DELABIE, Annelies, SWERTS, Johan, SCHRAM, Tom, DE GENDT, Stefan
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container_end_page 488
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container_title IEEE electron device letters
container_volume 28
creator RAGNARSSON, Lars-Ake
CHANG, Vincent S
BIESEMANS, Serge
HONG YU YU
CHO, Hag-Ju
CONARD, Thierry
KAI MIN YIN
DELABIE, Annelies
SWERTS, Johan
SCHRAM, Tom
DE GENDT, Stefan
description
doi_str_mv 10.1109/LED.2007.896900
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source IEEE Electronic Library (IEL)
subjects Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
title Achieving conduction band-edge effective work functions by La2O3 capping of hafnium silicates
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