A Silicon MEMS DC/DC Converter for Autonomous Vibration-to-Electrical-Energy Scavenger

This letter deals with an innovative design for a silicon MEMS DC/DC converter, to be used in autonomous mechanical-energy scavengers, based on electrostatic transduction. The device is made of bulk silicon and is fabricated using a batch process. It is 27 mm 3 in volume and resonates at 250 Hz. We...

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Veröffentlicht in:	IEEE electron device letters 2009-05, Vol.30 (5), p.481-483
Hauptverfasser:	Paracha, A.M., Basset, P., Galayko, D., Marty, F., Bourouina, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Autonomous Capacitance Capacitors Charge pumps Circuit properties Circuits Conversion Converters DC-DC power converters DC/DC power conversion Devices Direct current Electric, optical and optoelectronic circuits Electrical engineering. Electrical power engineering Electronic circuits Electronic equipment and fabrication. Passive components, printed wiring boards, connectics Electronics Electrostatics energy conversion Engineering Sciences Exact sciences and technology Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical devices Micromechanical devices Other Piezoelectric transducers Power electronics, power supplies Power supplies Scavengers Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Signal convertors Silicon Vibrations
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Zusammenfassung:	This letter deals with an innovative design for a silicon MEMS DC/DC converter, to be used in autonomous mechanical-energy scavengers, based on electrostatic transduction. The device is made of bulk silicon and is fabricated using a batch process. It is 27 mm 3 in volume and resonates at 250 Hz. We demonstrate a net vibration-to-electricity power conversion of between 60 and 100 nW in autonomous mode, i.e., without injecting and introducing new charges from an external power supply. We have compared the measurements with the results of a mixed VHDL-AMS/ELDO modeling experiment, and the agreement between these two experiments is better than 3%.
ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2009.2015780