Optical Observation of Nitrogen Propagation in Argon Plasma

While the gas flow patterns in reactors can be visualized using models, it has proven that it is difficult to measure them. This paper shows that the gas flow pattern for pulsed injection of nitrogen gas into argon plasma can be readily seen in the optical emission intensity. As N 2 enters the Ar pl...

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Veröffentlicht in:IEEE transactions on plasma science 2011-11, Vol.39 (11), p.2544-2545
Hauptverfasser: Ogawa, D., Goeckner, M. J., Overzet, L. J.
Format: Artikel
Sprache:eng
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Zusammenfassung:While the gas flow patterns in reactors can be visualized using models, it has proven that it is difficult to measure them. This paper shows that the gas flow pattern for pulsed injection of nitrogen gas into argon plasma can be readily seen in the optical emission intensity. As N 2 enters the Ar plasma, N 2 molecules cause increased optical emission intensity by the Penning effect. This allows one to measure the N 2 propagation. In this paper, we present the pictures with the measurement details and analysis.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2159625