Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source
Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set o...
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| Veröffentlicht in: | IEEE transactions on plasma science 2011-10, Vol.39 (10), p.1935-1942 |
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| container_end_page | 1942 |
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| container_issue | 10 |
| container_start_page | 1935 |
| container_title | IEEE transactions on plasma science |
| container_volume | 39 |
| creator | Nowakowska, H. Jasinski, M. Debicki, P. S. Mizeraczyk, J. |
| description | Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set of the tuning characteristics is presented. Optimization of the plasma source has been performed using these characteristics to ensure good power coupling and stability of the plasma source operation. The calculated tuning characteristics have been compared with experimental ones. Good agreement has been found. |
| doi_str_mv | 10.1109/TPS.2011.2163531 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_proquest_journals_901543013</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>6003795</ieee_id><sourcerecordid>963838976</sourcerecordid><originalsourceid>FETCH-LOGICAL-c322t-b3bafd0f8740cf7ce6f572aae7018686e605e0e9068c5b7bdd627c1c4abb12923</originalsourceid><addsrcrecordid>eNpdkE1LAzEQhoMoWD_ugpfgxdPWSdJNNsda6gdUW6jicclmJxLdj7rpKvXXm1Lx4GlgeN6XmYeQMwZDxkBfPS2WQw6MDTmTIhVsjwyYFjrRQqX7ZACgRSIyJg7JUQhvAGyUAh-Q98e-xs5bU9FxY6pN8IGapqTz1drX_tusfdvQ1tFF-4UdnbT9qvLNK506563Hxm6ob-iL-cTX3peYXJuAJX3wtmu_4pIuKhNqQ5dt31k8IQfOVAFPf-cxeb6ZPk3uktn89n4yniVWcL5OClEYV4LL1AisUxalSxU3BhWwTGYSJaQIqEFmNi1UUZaSK8vsyBQF45qLY3K561117UePYZ3XPlisKtNg24dcS5GJTCsZyYt_5Fu8NHqIELB0JICJCMEOik-F0KHLV52vTbfJGeRb93l0n2_d57_uY-R8F_GI-IdLAKF0Kn4AeFuAsg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>901543013</pqid></control><display><type>article</type><title>Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source</title><source>IEEE Electronic Library (IEL)</source><creator>Nowakowska, H. ; Jasinski, M. ; Debicki, P. S. ; Mizeraczyk, J.</creator><creatorcontrib>Nowakowska, H. ; Jasinski, M. ; Debicki, P. S. ; Mizeraczyk, J.</creatorcontrib><description>Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set of the tuning characteristics is presented. Optimization of the plasma source has been performed using these characteristics to ensure good power coupling and stability of the plasma source operation. The calculated tuning characteristics have been compared with experimental ones. Good agreement has been found.</description><identifier>ISSN: 0093-3813</identifier><identifier>EISSN: 1939-9375</identifier><identifier>DOI: 10.1109/TPS.2011.2163531</identifier><identifier>CODEN: ITPSBD</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Comparative analysis ; Computational efficiency ; Couplings ; Discharges ; Efficiency ; Electric fields ; Electric power generation ; Electron tubes ; Gases ; Joining ; Mathematical analysis ; Mathematical models ; Microwave plasma sources (MPSs) ; Microwave plasmas ; Microwave theory and techniques ; numerical analysis ; Optimization ; Plasma ; plasma generation ; plasma loaded waveguides ; Plasmas ; Tuning ; tuning characteristics</subject><ispartof>IEEE transactions on plasma science, 2011-10, Vol.39 (10), p.1935-1942</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Oct 2011</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c322t-b3bafd0f8740cf7ce6f572aae7018686e605e0e9068c5b7bdd627c1c4abb12923</citedby><cites>FETCH-LOGICAL-c322t-b3bafd0f8740cf7ce6f572aae7018686e605e0e9068c5b7bdd627c1c4abb12923</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6003795$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6003795$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Nowakowska, H.</creatorcontrib><creatorcontrib>Jasinski, M.</creatorcontrib><creatorcontrib>Debicki, P. S.</creatorcontrib><creatorcontrib>Mizeraczyk, J.</creatorcontrib><title>Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source</title><title>IEEE transactions on plasma science</title><addtitle>TPS</addtitle><description>Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set of the tuning characteristics is presented. Optimization of the plasma source has been performed using these characteristics to ensure good power coupling and stability of the plasma source operation. The calculated tuning characteristics have been compared with experimental ones. Good agreement has been found.</description><subject>Comparative analysis</subject><subject>Computational efficiency</subject><subject>Couplings</subject><subject>Discharges</subject><subject>Efficiency</subject><subject>Electric fields</subject><subject>Electric power generation</subject><subject>Electron tubes</subject><subject>Gases</subject><subject>Joining</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>Microwave plasma sources (MPSs)</subject><subject>Microwave plasmas</subject><subject>Microwave theory and techniques</subject><subject>numerical analysis</subject><subject>Optimization</subject><subject>Plasma</subject><subject>plasma generation</subject><subject>plasma loaded waveguides</subject><subject>Plasmas</subject><subject>Tuning</subject><subject>tuning characteristics</subject><issn>0093-3813</issn><issn>1939-9375</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkE1LAzEQhoMoWD_ugpfgxdPWSdJNNsda6gdUW6jicclmJxLdj7rpKvXXm1Lx4GlgeN6XmYeQMwZDxkBfPS2WQw6MDTmTIhVsjwyYFjrRQqX7ZACgRSIyJg7JUQhvAGyUAh-Q98e-xs5bU9FxY6pN8IGapqTz1drX_tusfdvQ1tFF-4UdnbT9qvLNK506563Hxm6ob-iL-cTX3peYXJuAJX3wtmu_4pIuKhNqQ5dt31k8IQfOVAFPf-cxeb6ZPk3uktn89n4yniVWcL5OClEYV4LL1AisUxalSxU3BhWwTGYSJaQIqEFmNi1UUZaSK8vsyBQF45qLY3K561117UePYZ3XPlisKtNg24dcS5GJTCsZyYt_5Fu8NHqIELB0JICJCMEOik-F0KHLV52vTbfJGeRb93l0n2_d57_uY-R8F_GI-IdLAKF0Kn4AeFuAsg</recordid><startdate>201110</startdate><enddate>201110</enddate><creator>Nowakowska, H.</creator><creator>Jasinski, M.</creator><creator>Debicki, P. S.</creator><creator>Mizeraczyk, J.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>201110</creationdate><title>Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source</title><author>Nowakowska, H. ; Jasinski, M. ; Debicki, P. S. ; Mizeraczyk, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c322t-b3bafd0f8740cf7ce6f572aae7018686e605e0e9068c5b7bdd627c1c4abb12923</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Comparative analysis</topic><topic>Computational efficiency</topic><topic>Couplings</topic><topic>Discharges</topic><topic>Efficiency</topic><topic>Electric fields</topic><topic>Electric power generation</topic><topic>Electron tubes</topic><topic>Gases</topic><topic>Joining</topic><topic>Mathematical analysis</topic><topic>Mathematical models</topic><topic>Microwave plasma sources (MPSs)</topic><topic>Microwave plasmas</topic><topic>Microwave theory and techniques</topic><topic>numerical analysis</topic><topic>Optimization</topic><topic>Plasma</topic><topic>plasma generation</topic><topic>plasma loaded waveguides</topic><topic>Plasmas</topic><topic>Tuning</topic><topic>tuning characteristics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Nowakowska, H.</creatorcontrib><creatorcontrib>Jasinski, M.</creatorcontrib><creatorcontrib>Debicki, P. S.</creatorcontrib><creatorcontrib>Mizeraczyk, J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on plasma science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Nowakowska, H.</au><au>Jasinski, M.</au><au>Debicki, P. S.</au><au>Mizeraczyk, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source</atitle><jtitle>IEEE transactions on plasma science</jtitle><stitle>TPS</stitle><date>2011-10</date><risdate>2011</risdate><volume>39</volume><issue>10</issue><spage>1935</spage><epage>1942</epage><pages>1935-1942</pages><issn>0093-3813</issn><eissn>1939-9375</eissn><coden>ITPSBD</coden><abstract>Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set of the tuning characteristics is presented. Optimization of the plasma source has been performed using these characteristics to ensure good power coupling and stability of the plasma source operation. The calculated tuning characteristics have been compared with experimental ones. Good agreement has been found.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TPS.2011.2163531</doi><tpages>8</tpages></addata></record> |
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| ispartof | IEEE transactions on plasma science, 2011-10, Vol.39 (10), p.1935-1942 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Comparative analysis Computational efficiency Couplings Discharges Efficiency Electric fields Electric power generation Electron tubes Gases Joining Mathematical analysis Mathematical models Microwave plasma sources (MPSs) Microwave plasmas Microwave theory and techniques numerical analysis Optimization Plasma plasma generation plasma loaded waveguides Plasmas Tuning tuning characteristics |
| title | Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-02T01%3A53%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Numerical%20Analysis%20and%20Optimization%20of%20Power%20Coupling%20Efficiency%20in%20Waveguide-Based%20Microwave%20Plasma%20Source&rft.jtitle=IEEE%20transactions%20on%20plasma%20science&rft.au=Nowakowska,%20H.&rft.date=2011-10&rft.volume=39&rft.issue=10&rft.spage=1935&rft.epage=1942&rft.pages=1935-1942&rft.issn=0093-3813&rft.eissn=1939-9375&rft.coden=ITPSBD&rft_id=info:doi/10.1109/TPS.2011.2163531&rft_dat=%3Cproquest_RIE%3E963838976%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=901543013&rft_id=info:pmid/&rft_ieee_id=6003795&rfr_iscdi=true |