Numerical Analysis and Optimization of Power Coupling Efficiency in Waveguide-Based Microwave Plasma Source

Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set o...

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Veröffentlicht in:	IEEE transactions on plasma science 2011-10, Vol.39 (10), p.1935-1942
Hauptverfasser:	Nowakowska, H., Jasinski, M., Debicki, P. S., Mizeraczyk, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Comparative analysis Computational efficiency Couplings Discharges Efficiency Electric fields Electric power generation Electron tubes Gases Joining Mathematical analysis Mathematical models Microwave plasma sources (MPSs) Microwave plasmas Microwave theory and techniques numerical analysis Optimization Plasma plasma generation plasma loaded waveguides Plasmas Tuning tuning characteristics
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Beschreibung
Zusammenfassung:	Three-dimensional electric field distributions in a waveguide-based microwave plasma source (MPS) have been determined numerically. Tuning characteristics of the MPS have been calculated using a direct and newly proposed two-port network method. A method for easy assessment of the quality of a set of the tuning characteristics is presented. Optimization of the plasma source has been performed using these characteristics to ensure good power coupling and stability of the plasma source operation. The calculated tuning characteristics have been compared with experimental ones. Good agreement has been found.
ISSN:	0093-3813 1939-9375
DOI:	10.1109/TPS.2011.2163531