Numerical study of a method for measuring small linear and angular displacements by laser interferometers

A measurement method for small linear and angular displacements with laser interferometers is developed; a mathematical model is presented for measurements taking account the vector nature of laser radiation. Results of a calculation-theoretical study on the basis of this method are presented.[PUBLI...

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Veröffentlicht in:Measurement techniques 2007-01, Vol.50 (1), p.10-16
Hauptverfasser: Miroshnichenko, I. P., Serkin, A. G., Sizov, V. P.
Format: Artikel
Sprache:eng
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Zusammenfassung:A measurement method for small linear and angular displacements with laser interferometers is developed; a mathematical model is presented for measurements taking account the vector nature of laser radiation. Results of a calculation-theoretical study on the basis of this method are presented.[PUBLICATION ABSTRACT]
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-007-0014-6