High-sensitivity accelerometer based on cold emission principle

High-sensitivity accelerometer based on cold emission principle

A possibility for fabrication of a high-sensitivity accelerometer is considered. The linear acceleration of a sensor causes displacement of the proof mass electrode. The displacement detector is based on a strong dependence of the tunneling or cold emission current on the gap between the electrodes....

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Veröffentlicht in:IEEE sensors journal 2004-04, Vol.4 (2), p.211-215
Hauptverfasser: Shashkin, V.I., Vostokov, N.V., Vopilkin, E.A., Klimov, A.Yu, Volgunov, D.G., Rogov, V.V., Lazarev, S.G.
Format: Artikel
Sprache:eng
Schlagworte:
Acceleration
Accelerometers
Detectors
Displacement
Electrodes
Emission
Fabrication
Feedback
Frequency
Geometry
Preamplifiers
Sensor phenomena and characterization
Sensors
Tunneling
Voltage
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Beschreibung
Zusammenfassung:A possibility for fabrication of a high-sensitivity accelerometer is considered. The linear acceleration of a sensor causes displacement of the proof mass electrode. The displacement detector is based on a strong dependence of the tunneling or cold emission current on the gap between the electrodes. The geometry of the electrodes that provides the best sensitivity is determined. The accelerometer with tunneling-emission electrodes is fabricated. At frequencies up to 5 kHz the resolution reaches 10/sup -4/ g/Hz/sup 1/2/ in the tunneling mode and 10/sup -3/ g/Hz/sup 1/2/ in the emission mode.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2004.823683