Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric
The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and...
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| Veröffentlicht in: | IEEE transactions on electron devices 2005-10, Vol.52 (10), p.2333-2336 |
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| container_title | IEEE transactions on electron devices |
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| creator | Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. |
| description | The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength. |
| doi_str_mv | 10.1109/TED.2005.856189 |
| format | Article |
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| ispartof | IEEE transactions on electron devices, 2005-10, Vol.52 (10), p.2333-2336 |
| issn | 0018-9383 1557-9646 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Applied sciences Bonding strength Breakage Breakdown Conduction mechanism Dielectric films Dielectrics Electric breakdown Electronics Exact sciences and technology Hydrocarbons low Materials Porosity Stability Strength Walls |
| title | Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric |
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