Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric

Effect of porosity on electrical stability of hydrocarbon polymeric low-k dielectric

The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and...

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Veröffentlicht in:IEEE transactions on electron devices 2005-10, Vol.52 (10), p.2333-2336
Hauptverfasser: Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Bonding strength
Breakage
Breakdown
Conduction mechanism
Dielectric films
Dielectrics
Electric breakdown
Electronics
Exact sciences and technology
Hydrocarbons
low
Materials
Porosity
Stability
Strength
Walls
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Beschreibung
Zusammenfassung:The incorporation of nanometer pores into a low-dielectric constant (low-k) aromatic hydrocarbon polymer significantly degrades the electrical characteristics and breakdown strength of the material. Enhanced electric field in the pores increases the probability of bond breakage on the pore walls and leads to the lowering of the overall breakdown strength.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2005.856189