MOEMS variable optical attenuators using rotary comb drive actuators

MOEMS variable optical attenuators using rotary comb drive actuators

We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical tran...

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Veröffentlicht in:IEEE photonics technology letters 2006-05, Vol.18 (10), p.1170-1172
Hauptverfasser: Yeh, J.A., Shiue-Shr Jiang, Chengkuo Lee
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Attenuation
Attenuators
Devices
Dynamic range
Electric potential
Electrostatic actuators
Fiber nonlinear optics
Footprints
Microoptoelectromechanical systems (MOEMS)
Mirrors
Nonlinear optics
Optical attenuators
Optical design
Optical devices
Optical fiber devices
Pneumatic actuators
rotary comb drive
Springs
variable optical attenuators (VOAs)
Voltage
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Beschreibung
Zusammenfassung:We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2times4.7 mm 2 only
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2006.873959