Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing

Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing

Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate...

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Veröffentlicht in:IEEE sensors journal 2008-09, Vol.8 (9), p.1539-1545
Hauptverfasser: Schjolberg-Henriksen, K., Schulz, O., Ferber, A., Moe, S., Lloyd, M., Muller, G., Suphan, K.-H., Wang, D.T., Bernstein, R.W.
Format: Artikel
Sprache:eng
Schlagworte:
Carbon dioxide
Carbon monoxide
Design engineering
Gas detectors
Gas sensors
Humidity
Humidity measurement
Length measurement
microelectromechanical devices
microsensors
Photoacoustic cells
photoacoustic effects
Pressure measurement
Pressure sensors
Prototypes
Pulp manufacturing
semiconductor device measurements
sensitivity
Sensor phenomena and characterization
Sensor systems
Sensors
Temperature sensors
Time measurement
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Zusammenfassung:Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO 2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO 2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH 4 , or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO 2 in the range from 25degC to 50degC.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2008.923588