Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control

Dynamic Geometric Compensation for Gantry Stage Using Iterative Learning Control

In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approa...

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Veröffentlicht in:IEEE transactions on instrumentation and measurement 2008-02, Vol.57 (2), p.413-419
Hauptverfasser: Teo, Chek-Sing, Tan, Kok-Kiong, Lim, Ser-Yong
Format: Artikel
Sprache:eng
Schlagworte:
Aerodynamics
Aerospace industry
Application software
Calibration
Costs
Dual-axis encoder
dynamic compensation
Dynamical systems
Dynamics
Error correction
Errors
Gantries
gantry stage
Interpolation
iterative learning control (ILC)
Iterative methods
Learning
Manufacturing industries
Optical control
permanent-magnet linear motors (PMLMs)
Solid modeling
Tracking
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Beschreibung
Zusammenfassung:In this paper, iterative learning control is used in a gantry stage to compensate for dynamic errors, hence improving the tracking accuracy of the system by using a dual-axis high-grade analog optical encoder as a reference in calibrating and modeling dynamical geometric errors. This proposed approach is able to compensate the errors for a given trajectory set. Experimental and simulation results are provided to highlight the principles and practical applicability of the proposed method that results from such an approach.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2007.910103