Design of Piezoelectric PZT Cantilever for Actuator Application

Piezoelectric MEMS cantilever is used as a basic element in sensing and actuation. This paper proposes a structural design of MEMS cantilever for actuator application based on bulk MEMS micromachining technique. The structure consists of a silicon dioxide cantilever with an attached piezoelectric la...

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Veröffentlicht in:	Sensors & transducers 2010-12, Vol.123 (12), p.16
Hauptverfasser:	Joshi, Abhay B, Bodas, Dhananjay, Gangal, S A
Format:	Artikel
Sprache:	eng
Schlagworte:	Asymmetry Crystal structure Dielectric properties Electrodes Microelectromechanical systems Sensors Silicon nitride Silicon wafers Stress concentration Thin films
Online-Zugang:	Volltext
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Zusammenfassung:	Piezoelectric MEMS cantilever is used as a basic element in sensing and actuation. This paper proposes a structural design of MEMS cantilever for actuator application based on bulk MEMS micromachining technique. The structure consists of a silicon dioxide cantilever with an attached piezoelectric layer. The cantilever is designed using analytical modeling and simulation tool: CoventorWare2009. Analytical and simulation results demonstrate deflection of 5.9 µm/V and 2.9 µm/V respectively with a resonant frequency of 23 kHz. Obtained results are discussed and compared with the reported data. [PUBLICATION ABSTRACT]
ISSN:	2306-8515 1726-5479