Ensuring the Global Comparability of XPS Data Through Intensity Scale Calibration: Summary of ISO 5861:2024

ABSTRACT For quantitative analyses of data acquired from x‐ray photoelectron spectroscopy (XPS) instruments to be globally comparable across industry and academia, a consistent and traceable intensity calibration method is required. ISO 5861 was prepared by Technical Committee ISO/TC 201 Surface Chemical Analysis, Subcommittee 7, Electron Spectroscopies, and describes an intensity calibration method for x‐ray photoelectron spectrometers that use quartz‐crystal monochromated Al Ka x‐rays. The method employs low‐density polyethylene reference spectra that are corrected for any instrument geometry and are traceable to the true reference spectra for gold, silver and copper held by the National Physical Laboratory (NPL), UK. This international standard generates a spectrometer relative response function for use in quantitative XPS analysis that is consistent with NPL's intensity calibration method to within 5% relative error.