Chemical-Mechanical Polishing of CdZnTe Substrates to Achieve the Surface Morphology for the Synthesis of A2B6 Solid Solutions by Molecular Beam Epitaxy
The structural perfection of a HgCdTe epitaxial layer with a minimum number of extended structural defects is ensured by the molecular beam epitaxy method and by the growth on substrates matched to the crystal lattice parameter. CdZnTe (211)B substrates (Orion Association, Moscow, Russia) have a tot...
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Veröffentlicht in: | Bulletin of the Russian Academy of Sciences. Physics 2024-09, Vol.88 (9), p.1496-1500 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The structural perfection of a HgCdTe epitaxial layer with a minimum number of extended structural defects is ensured by the molecular beam epitaxy method and by the growth on substrates matched to the crystal lattice parameter. CdZnTe (211)B substrates (Orion Association, Moscow, Russia) have a total thickness variation (TTV) of less than 1.5 μm and a surface roughness of
R
a
= 0.45 nm (rms = 0.58 nm). |
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ISSN: | 1062-8738 1934-9432 |
DOI: | 10.1134/S106287382470775X |