Chemometric Raman Spectral Analysis of Diamond-like Carbon Films Deposited by Plasma Discharge

In this study, a chemometric approach for five-peak separation analysis of the Raman spectra of diamond-like carbon (DLC) films was investigated. DLC films were deposited by high-frequency inclusion high-power impulse magnetron sputtering and alternating current high voltage burst plasma chemical vapor deposition. We used the pseudo-Voigt function as an alternative to the conventional Voigt function and applied the nonlinear least squares method. The results not only facilitate automated analysis but also guarantee highly accurate results regardless of the analyst’s level of expertise. This approach is expected to lead to consistent interpretation of Raman spectral analysis of DLC films and further research and understanding of the properties of DLC films.