Fluid Simulation over a Rotating Disk: Momentum and Mass Transfer across the Wafer Boundary

This research focuses on the crucial task of identifying the viscous sublayer in improving wet cleaning processes. Computational fluid dynamics (CFD) is employed to manipulate fluid properties and process parameters for optimizing cleaning efficiency. The research findings encompass the evolution of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Solid state phenomena 2023-08, Vol.346, p.231-235
Hauptverfasser:	Sato, Masanobu, Belmiloud, Naser, Okuno, Yasutoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Cleaning Computational fluid dynamics Fluid flow Large eddy simulation Mass transfer Parameter identification Process parameters Rotating disks Rotating fluids Thickness measurement Velocity distribution Viscous sublayers Vortices
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!