Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

This paper focuses on the mechanism and methodology of the dissolution of Alternative Dipole Material (ADM) and its inhibition through the use of functional waters. The study investigates the etching behavior of ADM in different solutions, examines the surface state of ADM before and after cleaning,...

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Veröffentlicht in:Solid state phenomena 2023-08, Vol.346, p.69-73
Hauptverfasser: Tanaka, Yoichi, Holsteyns, Frank, Givens, Michael, Lai, Ju Geng, Alessio Verni, Giuseppe, Altamirano-Sanchez, Efrain, Homkar, Suvidyakumar, Ogawa, Yuuichi, Iino, Hideaki, Arimura, Hiroaki, Brus, Stephan, Gan, Nobuko, Horiguchi, Naoto, Pacco, Antoine, Oniki, Yusuke, Chang, Ren Jie
Format: Artikel
Sprache:eng
Schlagworte:
Cleaning
Dipoles
Electrical properties
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Beschreibung
Zusammenfassung:This paper focuses on the mechanism and methodology of the dissolution of Alternative Dipole Material (ADM) and its inhibition through the use of functional waters. The study investigates the etching behavior of ADM in different solutions, examines the surface state of ADM before and after cleaning, and evaluates the impact of the functional water process on its electrical properties.
ISSN:1012-0394
1662-9779
1662-9779
DOI:10.4028/p-QqI9w5