94‐3: 60 kHz Ultrasonic Actuators for Animal‐Friendly Haptic Displays

Enhanced piezoelectric coefficient (d33) and mechanical quality factor (Qm) are prerequisite for high performance of resonant piezoelectric applications (e.g., ultrasound haptic displays). We present high performance piezoelectric actuators with a resonant frequency above 60 kHz beyond audible ranges for animals. The ultrasonic actuators provide sufficient tactile feedback with a high vibration displacement, which is superior to that of many state‐of‐the‐art commercial actuators without any visible damages in plastic organic light‐emitting diode (POLED) displays. Furthermore, the actuators can be assembled into an ultrasound loudspeaker, which could facilitate the directional private sound for high‐end automotive applications.