91‐3: Placement Accuracy of MicroLEDs in the 5µm Size Range Being Laser Mass Transferred

MicroLED displays require device placement accuracies that meet the dimensional restrictions of the contact pads. We will report on accuracies achieved by a laser forward transfer (LIFT) system with dies in the 5μm size range over gap distances around 10‐20 times the thickness of the devices and dis...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2024-06, Vol.55 (1), p.1282-1284
Hauptverfasser: Haupt, Oliver, Griffel, Thorge, Fatahilah, Muhammad, Brune, Jan
Format: Artikel
Sprache:eng
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Zusammenfassung:MicroLED displays require device placement accuracies that meet the dimensional restrictions of the contact pads. We will report on accuracies achieved by a laser forward transfer (LIFT) system with dies in the 5μm size range over gap distances around 10‐20 times the thickness of the devices and discuss the implications thereof.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17778