29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis

29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis

By analyzing OLED film layers using the TOF SIMS method with 3D imaging capability, we can effectively improve the detection of OLED defects and understand the constitutive relationship. This inspection method can be integrated into the production line to realize process improvement and defect inter...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2024-06, Vol.55 (1), p.377-381
Hauptverfasser: Zheng, Kening, Fu, Qiang, Shi, Bo, Chen, Long, Gao, Dongyu, Zhu, Li, Li, Langtao, Wang, Dengyu, Pan, Xuenan, Zhang, Kai, Yang, Dongfang, Tang, Guoqiang, Jin, Fujiang
Format: Artikel
Sprache:eng
Schlagworte:
Constitutive relationships
Defects
Doping analysis
Failure Analysis
Mass production
Organic Light‐Emitting Diode(OLED)
Production lines
Time of Flight Secondary Ion Mass Spectrometry(TOF SIMS)
Yb cathode blocking layer
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Beschreibung
Zusammenfassung:By analyzing OLED film layers using the TOF SIMS method with 3D imaging capability, we can effectively improve the detection of OLED defects and understand the constitutive relationship. This inspection method can be integrated into the production line to realize process improvement and defect interception during mass production.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17536