P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement

P‐101: Zero‐cost solution for TFT Panel non‐film surface strength improvement

The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2024-06, Vol.55 (1), p.1775-1777
Hauptverfasser: Wen, Huiming, Xiang, Lei, Wang, Guangjun, Xiong, Yong, Gao, Caiyong, Liu, Bo, Huang, Jian, Tan, Luolin
Format: Artikel
Sprache:eng
Schlagworte:
ESC for dry etching
Screens
Withstand drop strength
Zero-cost
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Zusammenfassung:The market demand for strength of display screens is constantly increasing, and solutions for slimming or polishing display screens can cost millions of dollars per year. This article provides a solution without increasing costs by upgrading the materials, specifications, and maintenance methods of ESC (Electrostatic Chuck) used for dry etching.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.17918