P‐7.8: Resistance Reduction in Molybdenum gate electrode by W Seed Layer
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| Veröffentlicht in: | SID International Symposium Digest of technical papers 2024-04, Vol.55 (S1), p.1076-1076 |
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| container_issue | S1 |
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| container_title | SID International Symposium Digest of technical papers |
| container_volume | 55 |
| creator | Gao, Zecui Koestenbauer, Harald Lorenz, Dominik Linke, Christian Winkler, Joerg Schmidt, Hennrik |
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| doi_str_mv | 10.1002/sdtp.17281 |
| format | Article |
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| ispartof | SID International Symposium Digest of technical papers, 2024-04, Vol.55 (S1), p.1076-1076 |
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| language | eng |
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| source | Wiley Journals |
| title | P‐7.8: Resistance Reduction in Molybdenum gate electrode by W Seed Layer |
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