High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask
A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow
Gespeichert in:
| Veröffentlicht in: | Physica status solidi. PSS-RRL. Rapid research letters 2024-05, Vol.18 (5), p.n/a |
|---|---|
| Hauptverfasser: | , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | n/a |
|---|---|
| container_issue | 5 |
| container_start_page | |
| container_title | Physica status solidi. PSS-RRL. Rapid research letters |
| container_volume | 18 |
| creator | Efimov, Alexey Patarashvili, Anton Maslennikov, Dmitry Davydov, Vladislav Kornyushin, Denis Ghorbani Fard, Mohammad Reza Labutov, Dmitry Torgunakov, Vitaly Zebreva, Margarita Ivanov, Victor |
| description | A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow |
| doi_str_mv | 10.1002/pssr.202300492 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_3050687461</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>3050687461</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2722-a48236b7cba01740fb4630c892a49e517218588a8422925dcc8a7d55034603023</originalsourceid><addsrcrecordid>eNqFkEFPwjAYhhejiYhePTfxPPzWdVt3JIBiAkpAz0tXOijOdbadhpu_wPgb_SV2YPDo6W2_vs_7pa_nXQbQCwDwdW2M7mHAIQBJ8ZHXCWiM_RgncHw4R-TUOzNmAxClCQk73udYrtbfH19zYVTZWKkqNGPWCl3JaoVUgQaqWjbcyjeBppJrZax210YLg_ItGpWC23bIrORoKGpl5C7EkX3hHlSJ-g26Z5WqmXae0nF2rVWzWjsVaCjFLsLRU2aez72TgpVGXPxq13u6GT0Oxv7k4fZu0J_4HCcY-4xQHMZ5wnMGQUKgyEkcAqcpZiQVUZDggEaUMkowTnG05JyyZBlFEJIYQldR17va59ZavTbC2GyjGl25lVkIEcQ0IXHgXL29q_230aLIai1fmN5mAWRt51nbeXbo3AHpHniXpdj-485mi8X8j_0BMeaI3w</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>3050687461</pqid></control><display><type>article</type><title>High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask</title><source>Wiley Online Library All Journals</source><creator>Efimov, Alexey ; Patarashvili, Anton ; Maslennikov, Dmitry ; Davydov, Vladislav ; Kornyushin, Denis ; Ghorbani Fard, Mohammad Reza ; Labutov, Dmitry ; Torgunakov, Vitaly ; Zebreva, Margarita ; Ivanov, Victor</creator><creatorcontrib>Efimov, Alexey ; Patarashvili, Anton ; Maslennikov, Dmitry ; Davydov, Vladislav ; Kornyushin, Denis ; Ghorbani Fard, Mohammad Reza ; Labutov, Dmitry ; Torgunakov, Vitaly ; Zebreva, Margarita ; Ivanov, Victor</creatorcontrib><description>A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary polyvinyl chloride (PVC) electrical tape as a mask instead of expensive photo or electronic resists. The work investigates the influence of a mask thickness (height) of 60–180 μm, a gap width of 120–380 μm, a substrate potential of 0.1–5 kV, and a deposition time of 10 and 120 min on the geometry and electrical properties of the lines. Charged Au nanoparticles 60 nm in size synthesized by spark discharge are the building blocks of microstructures. Numerical modeling of the process of focusing nanoparticles in COMSOL qualitatively confirms the found experimental dependencies. The electrical resistivity of the sintered lines is 6.34 times higher than that of bulk gold. The developed approach makes it possible to obtain high‐aspect microstructures and supports operation at atmospheric pressure.
A method using aerosol deposition of nanoparticles through a gap in an insulating tape or dielectric stencil is proposed to create narrow and conductive microstructures without expensive lithographic equipment. The study explores the impact of various parameters on the geometry of the structures, utilizing electrostatic focusing. This approach shows promise for creating high‐aspect interconnects in electronics and photonics.</description><identifier>ISSN: 1862-6254</identifier><identifier>EISSN: 1862-6270</identifier><identifier>DOI: 10.1002/pssr.202300492</identifier><language>eng</language><publisher>Weinheim: Wiley Subscription Services, Inc</publisher><subject>additive manufacturing ; aerosol charging ; Deposition ; Electric sparks ; Electrical properties ; focusing nanoparticles ; Gold ; inkjet printing ; Microstructure ; Nanoparticles ; Numerical models ; Polyvinyl chloride ; Substrates</subject><ispartof>Physica status solidi. PSS-RRL. Rapid research letters, 2024-05, Vol.18 (5), p.n/a</ispartof><rights>2024 Wiley‐VCH GmbH</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c2722-a48236b7cba01740fb4630c892a49e517218588a8422925dcc8a7d55034603023</cites><orcidid>0000-0003-3276-0277</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fpssr.202300492$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fpssr.202300492$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,780,784,1417,27924,27925,45574,45575</link.rule.ids></links><search><creatorcontrib>Efimov, Alexey</creatorcontrib><creatorcontrib>Patarashvili, Anton</creatorcontrib><creatorcontrib>Maslennikov, Dmitry</creatorcontrib><creatorcontrib>Davydov, Vladislav</creatorcontrib><creatorcontrib>Kornyushin, Denis</creatorcontrib><creatorcontrib>Ghorbani Fard, Mohammad Reza</creatorcontrib><creatorcontrib>Labutov, Dmitry</creatorcontrib><creatorcontrib>Torgunakov, Vitaly</creatorcontrib><creatorcontrib>Zebreva, Margarita</creatorcontrib><creatorcontrib>Ivanov, Victor</creatorcontrib><title>High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask</title><title>Physica status solidi. PSS-RRL. Rapid research letters</title><description>A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary polyvinyl chloride (PVC) electrical tape as a mask instead of expensive photo or electronic resists. The work investigates the influence of a mask thickness (height) of 60–180 μm, a gap width of 120–380 μm, a substrate potential of 0.1–5 kV, and a deposition time of 10 and 120 min on the geometry and electrical properties of the lines. Charged Au nanoparticles 60 nm in size synthesized by spark discharge are the building blocks of microstructures. Numerical modeling of the process of focusing nanoparticles in COMSOL qualitatively confirms the found experimental dependencies. The electrical resistivity of the sintered lines is 6.34 times higher than that of bulk gold. The developed approach makes it possible to obtain high‐aspect microstructures and supports operation at atmospheric pressure.
A method using aerosol deposition of nanoparticles through a gap in an insulating tape or dielectric stencil is proposed to create narrow and conductive microstructures without expensive lithographic equipment. The study explores the impact of various parameters on the geometry of the structures, utilizing electrostatic focusing. This approach shows promise for creating high‐aspect interconnects in electronics and photonics.</description><subject>additive manufacturing</subject><subject>aerosol charging</subject><subject>Deposition</subject><subject>Electric sparks</subject><subject>Electrical properties</subject><subject>focusing nanoparticles</subject><subject>Gold</subject><subject>inkjet printing</subject><subject>Microstructure</subject><subject>Nanoparticles</subject><subject>Numerical models</subject><subject>Polyvinyl chloride</subject><subject>Substrates</subject><issn>1862-6254</issn><issn>1862-6270</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2024</creationdate><recordtype>article</recordtype><recordid>eNqFkEFPwjAYhhejiYhePTfxPPzWdVt3JIBiAkpAz0tXOijOdbadhpu_wPgb_SV2YPDo6W2_vs_7pa_nXQbQCwDwdW2M7mHAIQBJ8ZHXCWiM_RgncHw4R-TUOzNmAxClCQk73udYrtbfH19zYVTZWKkqNGPWCl3JaoVUgQaqWjbcyjeBppJrZax210YLg_ItGpWC23bIrORoKGpl5C7EkX3hHlSJ-g26Z5WqmXae0nF2rVWzWjsVaCjFLsLRU2aez72TgpVGXPxq13u6GT0Oxv7k4fZu0J_4HCcY-4xQHMZ5wnMGQUKgyEkcAqcpZiQVUZDggEaUMkowTnG05JyyZBlFEJIYQldR17va59ZavTbC2GyjGl25lVkIEcQ0IXHgXL29q_230aLIai1fmN5mAWRt51nbeXbo3AHpHniXpdj-485mi8X8j_0BMeaI3w</recordid><startdate>202405</startdate><enddate>202405</enddate><creator>Efimov, Alexey</creator><creator>Patarashvili, Anton</creator><creator>Maslennikov, Dmitry</creator><creator>Davydov, Vladislav</creator><creator>Kornyushin, Denis</creator><creator>Ghorbani Fard, Mohammad Reza</creator><creator>Labutov, Dmitry</creator><creator>Torgunakov, Vitaly</creator><creator>Zebreva, Margarita</creator><creator>Ivanov, Victor</creator><general>Wiley Subscription Services, Inc</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-3276-0277</orcidid></search><sort><creationdate>202405</creationdate><title>High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask</title><author>Efimov, Alexey ; Patarashvili, Anton ; Maslennikov, Dmitry ; Davydov, Vladislav ; Kornyushin, Denis ; Ghorbani Fard, Mohammad Reza ; Labutov, Dmitry ; Torgunakov, Vitaly ; Zebreva, Margarita ; Ivanov, Victor</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2722-a48236b7cba01740fb4630c892a49e517218588a8422925dcc8a7d55034603023</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2024</creationdate><topic>additive manufacturing</topic><topic>aerosol charging</topic><topic>Deposition</topic><topic>Electric sparks</topic><topic>Electrical properties</topic><topic>focusing nanoparticles</topic><topic>Gold</topic><topic>inkjet printing</topic><topic>Microstructure</topic><topic>Nanoparticles</topic><topic>Numerical models</topic><topic>Polyvinyl chloride</topic><topic>Substrates</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Efimov, Alexey</creatorcontrib><creatorcontrib>Patarashvili, Anton</creatorcontrib><creatorcontrib>Maslennikov, Dmitry</creatorcontrib><creatorcontrib>Davydov, Vladislav</creatorcontrib><creatorcontrib>Kornyushin, Denis</creatorcontrib><creatorcontrib>Ghorbani Fard, Mohammad Reza</creatorcontrib><creatorcontrib>Labutov, Dmitry</creatorcontrib><creatorcontrib>Torgunakov, Vitaly</creatorcontrib><creatorcontrib>Zebreva, Margarita</creatorcontrib><creatorcontrib>Ivanov, Victor</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Physica status solidi. PSS-RRL. Rapid research letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Efimov, Alexey</au><au>Patarashvili, Anton</au><au>Maslennikov, Dmitry</au><au>Davydov, Vladislav</au><au>Kornyushin, Denis</au><au>Ghorbani Fard, Mohammad Reza</au><au>Labutov, Dmitry</au><au>Torgunakov, Vitaly</au><au>Zebreva, Margarita</au><au>Ivanov, Victor</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask</atitle><jtitle>Physica status solidi. PSS-RRL. Rapid research letters</jtitle><date>2024-05</date><risdate>2024</risdate><volume>18</volume><issue>5</issue><epage>n/a</epage><issn>1862-6254</issn><eissn>1862-6270</eissn><abstract>A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary polyvinyl chloride (PVC) electrical tape as a mask instead of expensive photo or electronic resists. The work investigates the influence of a mask thickness (height) of 60–180 μm, a gap width of 120–380 μm, a substrate potential of 0.1–5 kV, and a deposition time of 10 and 120 min on the geometry and electrical properties of the lines. Charged Au nanoparticles 60 nm in size synthesized by spark discharge are the building blocks of microstructures. Numerical modeling of the process of focusing nanoparticles in COMSOL qualitatively confirms the found experimental dependencies. The electrical resistivity of the sintered lines is 6.34 times higher than that of bulk gold. The developed approach makes it possible to obtain high‐aspect microstructures and supports operation at atmospheric pressure.
A method using aerosol deposition of nanoparticles through a gap in an insulating tape or dielectric stencil is proposed to create narrow and conductive microstructures without expensive lithographic equipment. The study explores the impact of various parameters on the geometry of the structures, utilizing electrostatic focusing. This approach shows promise for creating high‐aspect interconnects in electronics and photonics.</abstract><cop>Weinheim</cop><pub>Wiley Subscription Services, Inc</pub><doi>10.1002/pssr.202300492</doi><tpages>10</tpages><orcidid>https://orcid.org/0000-0003-3276-0277</orcidid></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 1862-6254 |
| ispartof | Physica status solidi. PSS-RRL. Rapid research letters, 2024-05, Vol.18 (5), p.n/a |
| issn | 1862-6254 1862-6270 |
| language | eng |
| recordid | cdi_proquest_journals_3050687461 |
| source | Wiley Online Library All Journals |
| subjects | additive manufacturing aerosol charging Deposition Electric sparks Electrical properties focusing nanoparticles Gold inkjet printing Microstructure Nanoparticles Numerical models Polyvinyl chloride Substrates |
| title | High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T17%3A49%3A39IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=High%E2%80%90Resolution%20Patterning%20of%20Conductive%20Microstructures%20by%20Electrostatic%20Deposition%20of%20Aerosol%20Au%20Nanoparticles%20through%20the%20Dielectric%20Mask&rft.jtitle=Physica%20status%20solidi.%20PSS-RRL.%20Rapid%20research%20letters&rft.au=Efimov,%20Alexey&rft.date=2024-05&rft.volume=18&rft.issue=5&rft.epage=n/a&rft.issn=1862-6254&rft.eissn=1862-6270&rft_id=info:doi/10.1002/pssr.202300492&rft_dat=%3Cproquest_cross%3E3050687461%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=3050687461&rft_id=info:pmid/&rfr_iscdi=true |