The Effect of Thermal Exposure on Change in the Chemical Composition of the Surface Layers of a Titanium Alloy with a Sputtered Carbon Film after Irradiation with N+ Ions

— The effect of thermal exposure under high vacuum conditions on the chemical composition of the surface layers of the VT6 alloy with the mixed implantation of N + ions by a carbon film is investigated. It is shown that under the conditions of thermal exposure the change in the concentration profiles of the distribution of elements is determined by the processes of chemical interaction, in which the diffusion of carbon and nitrogen into deeper layers does not occur. On the contrary, their concentration decreases and this is due to the formation of volatile compounds CO, CO 2 , or (CH) 2 under thermal exposure. Titanium in the surface analyzed layer is in an oxidized state with various degrees of oxidation. Up to a depth of about 10 nm, the oxidation states of titanium are Ti 4+ and Ti 3+ ; in the transition region of the film/substrate, Ti 2+ .