Arc-PVD Coating Thickness Uniformity Improving on Complex Geometry Surfaces

Arc-PVD Coating Thickness Uniformity Improving on Complex Geometry Surfaces

We presented the algorithm for ARC-PVD coating thickness calculation and rotation speed optimization. This approach was used to improve the coating thickness uniformity of complex surface samples. Established that the selected rotation speed increased the thickness uniformity from 0.5–9 µm range to...

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2024-04, Vol.88 (4), p.644-650
Hauptverfasser: Oleinik, A. V., Nazarov, A. Yu, Ramazanov, K. N., Husainov, Yu. G., Nagimov, R. Sh
Format: Artikel
Sprache:eng
Schlagworte:
Algorithms
Coating
Hadrons
Heavy Ions
Microhardness
Nuclear Physics
Physics
Physics and Astronomy
Rotation
Scratch tests
Thickness
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Zusammenfassung:We presented the algorithm for ARC-PVD coating thickness calculation and rotation speed optimization. This approach was used to improve the coating thickness uniformity of complex surface samples. Established that the selected rotation speed increased the thickness uniformity from 0.5–9 µm range to 2–8.5 µm. Microhardness increased by an average of 30% compared with basic rotation speed. Scratch tests and roughness measurement did not have any significant changes.
ISSN:1062-8738
1934-9432
DOI:10.1134/S1062873823706177