Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data
Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films...
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| Veröffentlicht in: | Optics and spectroscopy 2023-07, Vol.131 (7), p.550-553 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-f
x
Zr
y
O
2
and lanthanum-alloyed hafnia-zirconium oxide films La:Hf
x
Zr
y
O
2
. Fluctuations of thickness in Hf
x
Zr
y
O
2
do not exceed 3.5%, fluctuations of thickness in La:Hf
x
Zr
y
O
2
films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, Hf
x
Zr
y
O
2
films contain 46% HfO
2
, 54% ZrO
2
, La:Hf
x
Zr
y
O
2
films contain 47.5% HfO
2
, 52.4% ZrO
2
, 2.5% La
2
O
3
. |
|---|---|
| ISSN: | 0030-400X 1562-6911 |
| DOI: | 10.1134/S0030400X23050107 |