Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics
— The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for t...
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| Veröffentlicht in: | Russian microelectronics 2023-12, Vol.52 (Suppl 1), p.S267-S273 |
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| container_end_page | S273 |
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| container_issue | Suppl 1 |
| container_start_page | S267 |
| container_title | Russian microelectronics |
| container_volume | 52 |
| creator | Egorov, V. Egorov, E. |
| description | —
The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered. |
| doi_str_mv | 10.1134/S1063739723600644 |
| format | Article |
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The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.</description><identifier>ISSN: 1063-7397</identifier><identifier>EISSN: 1608-3415</identifier><identifier>DOI: 10.1134/S1063739723600644</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Analytical techniques ; Diagnostics ; Electrical Engineering ; Engineering ; Ion beams ; Nanostructure ; Waveguides</subject><ispartof>Russian microelectronics, 2023-12, Vol.52 (Suppl 1), p.S267-S273</ispartof><rights>Pleiades Publishing, Ltd. 2023. ISSN 1063-7397, Russian Microelectronics, 2023, Vol. 52, Suppl. 1, pp. S267–S273. © Pleiades Publishing, Ltd., 2023.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c1834-ce47208382e9f2cdd68ee6b8b9827e2427ccdc2d285c1aa53f6354efbd035d903</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1063739723600644$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1063739723600644$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Egorov, V.</creatorcontrib><creatorcontrib>Egorov, E.</creatorcontrib><title>Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics</title><title>Russian microelectronics</title><addtitle>Russ Microelectron</addtitle><description>—
The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.</description><subject>Analytical techniques</subject><subject>Diagnostics</subject><subject>Electrical Engineering</subject><subject>Engineering</subject><subject>Ion beams</subject><subject>Nanostructure</subject><subject>Waveguides</subject><issn>1063-7397</issn><issn>1608-3415</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNp1kEtLAzEUhYMoWKs_wF3A9WiSm2QyS62vQn2ACu6GNLnTB-2kJjOL_ntTKrgQV_dyz3fOhUPIOWeXnIO8euNMQwlVKUAzpqU8IAOumSlAcnWY9ywXO_2YnKS0ZIxnSg_I3Ti09AbtOlHbevpZRLulT9jNg0-0CZF2c6SvK9vaSJ9tG1IXe9f1ERO9XdjZ7rBw6ZQcNXaV8OxnDsnH_d376LGYvDyMR9eTwnEDsnAoS8EMGIFVI5z32iDqqZlWRpQopCid8054YZTj1ipoNCiJzdQzUL5iMCQX-9xNDF89pq5ehj62-WUtqhIkKMV1pviecjGkFLGpN3GxtnFbc1bv2qr_tJU9Yu9JmW1nGH-T_zd9A0ZYapA</recordid><startdate>20231201</startdate><enddate>20231201</enddate><creator>Egorov, V.</creator><creator>Egorov, E.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20231201</creationdate><title>Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics</title><author>Egorov, V. ; Egorov, E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1834-ce47208382e9f2cdd68ee6b8b9827e2427ccdc2d285c1aa53f6354efbd035d903</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Analytical techniques</topic><topic>Diagnostics</topic><topic>Electrical Engineering</topic><topic>Engineering</topic><topic>Ion beams</topic><topic>Nanostructure</topic><topic>Waveguides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Egorov, V.</creatorcontrib><creatorcontrib>Egorov, E.</creatorcontrib><collection>CrossRef</collection><jtitle>Russian microelectronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Egorov, V.</au><au>Egorov, E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics</atitle><jtitle>Russian microelectronics</jtitle><stitle>Russ Microelectron</stitle><date>2023-12-01</date><risdate>2023</risdate><volume>52</volume><issue>Suppl 1</issue><spage>S267</spage><epage>S273</epage><pages>S267-S273</pages><issn>1063-7397</issn><eissn>1608-3415</eissn><abstract>—
The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1063739723600644</doi></addata></record> |
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| identifier | ISSN: 1063-7397 |
| ispartof | Russian microelectronics, 2023-12, Vol.52 (Suppl 1), p.S267-S273 |
| issn | 1063-7397 1608-3415 |
| language | eng |
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| source | SpringerLink Journals - AutoHoldings |
| subjects | Analytical techniques Diagnostics Electrical Engineering Engineering Ion beams Nanostructure Waveguides |
| title | Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics |
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