Ion Beams and X-ray Methods for the Planar Nanostructures Diagnostics

— The work presents short descriptions of ion beam methods and X-ray diagnostics in conditions of the total external reflection geometry with accent on the planar nanostructures peculiarities study. These objects specificity is described, and these are formulated tasks, which are more suitable for these method applications. Experimental results, which confirm the high efficiency of real objects investigation by these methods are discussed. Possible directions of ion beam analysis and X-ray methodical background on base of the planar X-ray waveguide-resonators application are pointed. The profit from its devises use is re-ndered.