Some Properties of Argon as an Actinometric Atom. II. Metastable Levels Quenching

Argon metastable levels quenching rate constant data are collected and analyzed from about 30 experimental studies. The main attention is paid to molecules that are used in plasma-chemical processes in microelectronics. All data are presented in detailed tables. They correspond to room temperature. The results obtained can be useful in developing models of the actinometric method for diagnosing low-temperature low-pressure plasma, as well as models of low-pressure discharges in argon-containing mixtures.