Submicron Focusing of X-rays by Silicon Planar Compound Refractive Lenses

The experimental study of optical properties of X-ray silicon planar compound refractive lenses at the synchrotron radiation source “KISI–Kurchatov” (Moscow, Russia) are presented. The capability to generate a submicron X-ray beam using refractive optics was demonstrated for the first time at this facility. The parameters of the focused beam were determined using the knife-edge technique. The measured minimum lateral focal spot size was 460 ± 70 nm. Additionally, the spatial structure of the beam in the focal spot area was examined. Theoretical estimates of the lenses optical properties and the corresponding computer simulation results are in agreement with the experimental data.