Numerical Simulation of Photoelectric Emission from a Nano-structured Surface

A new method of X-ray photoelectron spectra processing based on a target model with a stochastic surface layer is proposed. On the basis of this model, X-ray photoelectron spectra of multilayer multicomponent metallic targets with an inhomogeneous surface layer are obtained for various probing angles considering surface shading effects. A layer-by-layer phase profile of metallic samples is obtained using the advanced method of surface analysis based on angle-resolved X-ray photoelectron spectroscopy. The results are validated by atomic force microscopy.