Comparison of Deuterium Retention in Tungsten Films of Various Thickness

A comparative study of the deuterium content in tungsten-deuterium layers 50, 250, and 750 nm thick co-deposited from a magnetron discharge plasma on molybdenum substrates has been carried out. The measurements were carried out by in vacuo thermal desorption spectroscopy without contact with the atmosphere. Simulation of experimental data in the TMAP7 code has been carried out; concentrations and energies of traps have been obtained at which the best agreement with experiment is achieved. The content of deuterium in the films deposited at a temperature of ~100°C was 3–5 at %. It has been shown that the film thickness does not significantly affect the characteristics of deuterium retention trapping centers, although the shape of the spectra for the thickest films is slightly different.