Implementation of Low Voltage MOSFET and Power LDMOS on InGaAs

In this paper, a new low voltage MOSFET (LV MOSFET) and high voltage dual-gate MOSFET (HV DG MOSFET) have been proposed with concept of integration based on trench technology on InGaAs material. Junction isolation technique is used for the implementation of a low voltage MOSFET and a high power dual gate MOSFET in same InGaAs epitaxial layer side by side. The HV DG MOSFET consists of dual gate that are placed in drift region under the oxide-filled trenches. The proposed structure minimize on-resistance (R on ) along with increased breakdown voltage (V br ) due to enhanced RESURF effect, the creation of dual channels, and due to folding technique of drift region in vertical direction. In the HV DG MOSFET, the drain current (I D ) increases leading to enhanced transconductance (gm) by simultaneous conduction of channels with improved maximum oscillation frequency (f max ) and cut-off frequency (f t ). On the other side, the low voltage MOSFET consists of a gate placed in a centre of the structure within an oxide trench to create two n-channels in the p-base. The two channels are conducting in parallel and give substantial enhancement in peak g m , I D , f max and f t with more control over the short channel parameters. The design and performance analysis of low voltage MOSFET (LV MOSFET) and high voltage dual-gate MOSFET (HV DG MOSFET) are carried out on 2-D ATLAS device simulator.